微纳米机械加工工艺与装备

51222504
2012
E0509.加工制造
闫永达
优秀青年科学基金项目
教授
哈尔滨工业大学
100万元
超精密加工;纳米机械加工;微结构
2013-01至2015-12
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 Fabrication of millimeter scale nanochannels using the AFM tip-based nanomachining method 期刊论文 Geng Yanquan;Yan Yongda;Zhao Xuesen;Hu Zhenjiang;Liang Yingchun;Sun Tao;Dong Sen
2 Effects of scratching parameters on fabrication of polymer nanostructures in atomic force microscope tapping mode 会议论文 Yan, Y.D.|Hu, Z.J.|Liu, W.T.|Zhao, X.S.|
3 Mechanisms of anisotropic friction in nanotwinned Cu revealed by atomistic simulations 期刊论文 Zhang J. J.;Hartmaier A.;Wei Y. J.;Yan Y. D.;Sun T.
4 Controlled nanodot fabrication by rippling polycarbonate surface using an AFM diamond tip 期刊论文 Yan Yongda|Su Yang|Li Jiran|Hu Zhenjiang|
5 Study on Effects of Scan Parameters on the Image Quality and Tip Wear in AFM Tapping Mode 期刊论文 Xue Bo;Yan Yongda;Hu Zhenjiang;Zhao Xuesen
6 Atomistic insight into the minimum wear depth of Cu(111) surface 期刊论文 Li, Zengqiang|Huang, Yanhua|Zhang, Junjie|Yan, Yongda|Sun, Tao|
7 Effect of the Molecular Weight on Deformation States of the Polystyrene Film by AFM Single Scanning 期刊论文 Sun Yang;Yan Yongda;Liang Yingchun;Hu Zhenjiang;Zhao Xuesen;Sun Tao;Dong Shen
8 Nano Protuberance Formation by a Vibrating AFM Tip on moulded PC Surfaces 会议论文 Yan Yongda|Hu Zhenjiang|Liu Weitao|
9 Effects of AFM tip-based direct and vibration assisted scratching methods on nanogrooves fabrication on a polymer resist 期刊论文 Yanquan Geng|Yongda Yan|Yun Zhuang|Zhenjiang Hu|
10 Fast fabrication of three dimensional polymer nanopatterns induced by the atomic force microscope 会议论文 Yongda Yan|Yang Sun|Zhenjiang Hu|Xuesen Zhao|
11 Fabrication of nanochannels with complex three-dimensional structures based on a modified atomic force microscopy nanoscratching system 期刊论文 Bowen Yu;Yanquan Geng;Yongda Yan;Zhenjiang Hu
12 Recent advances in AFM tip-based nanomechanical machining 期刊论文 Yan Yongda;Geng Yanquan;Hu Zhenjiang
13 Effect of cantilever deformation and tip-sample contact area on AFM nanoscratching 期刊论文 Geng Yanquan;Yan Yongda;Xing Yangming;Zhang Qi;Zhao Xuesen;Hu Zhenjiang
14 Fabrication of nanochannels with ladder nanostructure at the bottom using AFM nanoscratching method 期刊论文 Yan Yongda;Geng Yanquan;Hu Zhenjiang;Zhao Xuesen;Yu Bowen;Zhang Qi
15 Study on the micro-machining process with a micro three-sided pyramidal tip and the circular machining trajectory 期刊论文 Xue Bo;Yan Yongda;Li Jiran;Yu Bowen;Hu Zhenjiang;Zhao Xuesen;Cai Qiong
16 Experimental and Theoretical Investigation of Crystallographic Orientation Dependence of Nanoscratching of Single Crystalline Copper 期刊论文 Geng Yanquan;Zhang Junjie();Yan Yongda;Yu Bowen;Geng Lin;Sun Tao
17 Machining slight burr formed micro-channels with different moving trajectories of a pyramidal diamond tip 期刊论文 Yongda Yan;Bo Xue;Zhenjiang Hu;Dongze Wu
18 An AFM-based methodology for measuring axial and radial error motions of spindles 期刊论文 Geng Yanquan;Zhao Xuesen;Yan Yongda;Hu Zhenjiang
19 AFM tip characterization by using FFT filtered images of step structures 期刊论文 Yongda Yan;Bo Xue;Zhenjiang Hu;Xuesen Zhao
20 Modelling and experimental study of machined depth in AFM-based milling of nanochannels 期刊论文 Geng, Yanquan|Yan, Yongda|Xing, Yangming|Zhao, Xuesen|Hu, Zhenjiang|
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