微纳制造中的表面/界面行为及控制技术研究

51021064
2010
E0512.微纳机械系统
雒建斌
创新研究群体项目
教授
清华大学
600万元
2011-01至2013-12
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 Aminosilanization nanoadhesive layer for nanoelectric circuits with porous ultralow dielectric film 期刊论文 Zhao Zhongkai;He Yongyong;Yang Haifang;Qu Xinping;Lu Xinchun;Luo Jianbin
2 Tribo-chemical Behavior of Copper in Chemical Mechanical Planarization 期刊论文 Li Jing;Chai Zhimin;Liu Yuhong;Lu Xinchun
3 Direct-liquid-cooled Nd:YAG thin disk laser oscillator 期刊论文 Fu Xing;Liu Qiang;Li Peilin;Gong Mali
4 提高低重频激光脉冲光纤放大效率的系统及其方法 专利 张海涛; 巩马理; 黄志华; 闫平; 柳强; 黄磊; 程文雍
5 Structure parameter of electrorheological fluids in shear flow 期刊论文 Jiang, Jile|Tian, Yu|Meng, Yonggang|
6 抛光液物理参数测量装置、测量方法和化学机械抛光设备 专利 路新春;赵德文;何永勇;雒建斌
7 Influence of ytterbium on the electrochemical property of PbCaSn alloy in sulfuric acid solution 期刊论文 D.G. Li;J.D. Wang;D.R. Chen
8 A study of surface texturing of carbon steel by photochemical machining 期刊论文 Zhang Jinyu;Meng Yonggang
9 Superlubricity Achieved with Mixtures of Polyhydroxy Alcohols and Acids 期刊论文 Li Jinjin;Zhang Chenhui;Luo Jianbin
10 抛光垫修整头 专利 路新春; 沈攀; 何永勇; 雒建斌
11 一种用于光纤激光器的滤波腔镜及光纤激光器 专利 巩马理; 闫平; 张海涛; 廖素英; 郝金坪
12 An experimental study on the normal stress of magnetorheological fluids 期刊论文 Jiang Jile;Tian Yu;Ren Dongxue;Meng Yonggang
13 仿生粘着的机理及应用研究 奖励 温诗铸;周铭
14 Effects of the Polishing Variables on the Wafer-Pad Interfacial Fluid Pressure in Chemical Mechanical Polishing of 12-Inch Wafer 期刊论文 Zhao Dewen;He Yongyong;Wang Tongqing;Lu Xinchun;Luo Jianbin
15 一种双向泵浦光纤激光器 专利 巩马理;郝金坪;闫平;肖起榕;张海涛
16 Effect of Surface Energy on the Wear Process of Bulk-Fabricated MEMS Devices 期刊论文 Shen Sihan;Meng Yonggang
17 Superlubricity achieved with mixtures of acids and glycerol 期刊论文 Li, Jinjin|Zhang, Chenhui|Ma, Liran|Liu, Yuhong|Luo, Jianbin|
18 Underwater locomotion strategy by a benthic pennate diatom Navicula sp. 期刊论文 Wang Jiadao;Cao Shan;Du Chuan;Chen Darong
19 高灵活度五轴联动混联铣床的机构设计方法及应用 奖励 谢福贵
20 一种制备硅溶胶的方法 专利 潘国顺;顾忠华;雒建斌;路新春;刘岩
21 激光器热透镜效应的补偿装置 专利 巩马理; 胡震岳; 黄磊; 柳强; 闫平; 张海涛
22 Influence of potentiostatic aging, temperature and pH on the diffusivity of a point defect in the passive film on Nb in an HCl solution 期刊论文 Li D. G.;Wang J. D.;Chen D. R.
23 Progress in experimental study of aqueous lubrication 期刊论文 Ma Liran;Zhang Chenhui;Liu Shuhai
24 一种摆脱重力束缚的光纤双向火头系统 专利 闫平; 肖起榕; 陈霄; 巩马理
25 纳米级润滑膜分子排列取向的拉曼光谱表征技术 期刊论文 张洪玉;张韶华;梁鹤;刘宇宏;雒建斌
26 一种激光走离效应补偿方法 专利 巩马理; 柳强; 陈海龙; 黄磊; 闫平; 张海涛; 刘欢
27 Atomic-scale friction in graphene oxide: An interfacial interaction perspective from first-principles calculations 期刊论文 Wang Lin Feng;Ma Tian Bao;Hu Yuan Zhong;Wang Hui
28 The Role of Hydroxyethyl Cellulose (HEC) in the Chemical Mechanical Planarization of Copper 期刊论文 Pan Yan;Liu Yuhong;Lu Xinchun;Pan Guoshun;Luo Jianbin
29 Transient response of sheared magnetic powder excited by a stepwise magnetic field and its comparison with ER and MR fluids 期刊论文 Chen KaiKai;Tian Yu;Shan Lei;Jiang Jile
30 Modification on the tribological properties of ceramics lubricated by water using fullerenol as a lubricating additive 期刊论文 Liu YuHong;Wang XiaoKang;Liu PengXiao;Zheng JunPeng;Shu ChunYing;Pan GuoShun;Luo JianBin
31 Friction and wear behaviors of compacted graphite iron with different biomimetic units fabricated by laser cladding 期刊论文 Sun Na;Shan Hongyu;Zhou Hong;Chen Darong;Li Xiaoyan;Xia Wen;Ren Luquan
32 一种摻意光纤放大系统 专利 闫平; 郝金萍; 巩马理; 肖起榕; 张海涛
33 红外非稳腔光参量激光器技术 奖励 巩马理|柳强|黄磊|尚卫东|翟刚|刘景峰|
34 载荷对壁虎刚毛束的摩擦各向异性特性影响的实验研究 期刊论文 万进;田煜;周铭;张向军;孟永钢
35 Investigation on growth process and tribological behavior of mixed alkylsilane self-assembled molecular films in aqueous solution 期刊论文 Yuhong Liu;Pengxiao Liu;Yuqi Xiao;Jianbin Liu
36 Optimal design of a main driving mechanism for servo punch press based on performance atlases 期刊论文 Zhou Yanhua;Xie Fugui;Liu Xinjun
37 一种具有多掩模的光刻机硅片台系统 专利 朱煜;张鸣;汪劲松;田丽;徐登峰;尹文生;段广洪;胡金春;许岩
38 Adhesion resistance surfaces against clay resulting from biomimetic adaptation 期刊论文 Sun Na;Shan Hongyu;Zhou Hong;Chen Darong;Ren Luquan
39 A flexible nanobrush pad for the chemical mechanical planarization of Cu/ultra-low-kappa materials 期刊论文 Han Guiquan;Liu Yuhong;Lu Xinchun;Luo Jianbin
40 A comparative study between graphene oxide and diamond nanoparticles as water-based lubricating additives 期刊论文 Liu Yuhong;Wang Xiaokang;Pan Guoshun;Luo Jianbin
41 提高光纤自聚焦阈值功率的方法及光纤 专利 张海涛;巩马理;黄志华;阎平;柳强;黄磊;刘明;郑超
42 光纤高功率激光输出端面反馈抑制装置 专利 巩马理;肖起榕;闫平;张海涛;柳强;黄磊
43 利用低熔点介质实现光纤侧面熔接耦合的方法 专利 闫平; 巩马理; 郝金萍; 张海涛; 柳强; 黄磊
44 Thin liquid film lubrication under external electrical fields: Roles of liquid intermolecular interactions 期刊论文 Xie Guoxin;Luo Jianbin;Liu Shuhai;Guo Dan;Zhang Chenhui
45 化学机械抛光机及具有它的化学机械抛光设备 专利 路新春;许振杰;何永勇;王同庆;沈攀;赵德文;梅赫赓;张连清;裴召辉;雒建斌
46 Energy Dissipation in atomic-scale Friction 期刊论文 Hu Yuanzhong, Ma Tianbao, Wang Hui|
47 大模场光纤泵浦耦合器及其制造方法 专利 巩马理;肖起榕;闫平;张海涛;柳强;黄磊
48 用于化学机械抛光设备的晶圆交换装置 专利 路新春; 张连清; 沈攀; 何永勇
49 保偏光纤泵浦耦合器及其制造方法 专利 巩马理;闫平;肖起榕;张海涛;柳强;黄磊
50 一种激光增益棒及具有其的激光振荡器和激光放大器 专利 巩马理;陈海龙;黄磊;柳强;闫平;张海涛
51 抛光液厚度测量装置、测量方法和化学机械抛光设备 专利 路新春;赵德文;何永勇;雒建斌
52 Material removal mechanism of copper CMP from a chemical-mechanical synergy perspective 期刊论文 Li, Jing|Liu, Yuhong|Lu, Xinchun|Luo, Jianbin|Dai, Yuanjing|
53 宽光谱纳秒脉冲光超高峰值功率光纤放大系统 专利 张海涛; 巩马理; 黄志华; 阎平; 柳强; 黄磊; 程文雍; 刘明; 郑超
54 一种光纤 专利 巩马理; 肖起榕; 王飞; 陈霄; 闫平; 张海涛
55 光纤侧面泵浦耦合器及其制造方法 专利 巩马理;肖起榕;闫平;张海涛;柳强;黄磊
56 Influences of welding parameters on mechanical properties of AZ31 friction stir spot welds 期刊论文 Sun Na;North T. H.;Chen Darong;Yin Y. H.
57 一种实时观测纳米颗粒运动的实验台 专利 郭丹;雷均;雒建斌
58 并联机器人机构拓扑与尺度设计理论 奖励 高峰;刘辛军;赵现朝;金振林;李为民
59 Superlubricity Behavior with Phosphoric Acid-Water Network Induced by Rubbing 期刊论文 Li Jinjin;Zhang Chenhui;Luo Jianbin
60 一种均匀度高的二氧化硅溶胶的制备方法 专利 潘国顺;顾忠华;雒建斌;路新春;刘岩
61 一种多掩模的光刻机硅片台系统 专利 朱煜;张鸣;汪劲松;田丽;徐登峰;尹文生;段广洪;胡金春;许岩
62 机械润滑和界面行为的电磁场调控 奖励 孟永钢;田煜;赵乾;张向军;温诗铸;蒋继乐;常秋英;贺四清
63 抛光头 专利 路新春;王同庆;何永勇;雒建斌
64 Bonding Structures and Mechanical Properties of Silicon Doped Carbon Nitride Films 奖励 魏松波|邵天敏|
65 外加电场下纳米级润滑膜的成膜特性及微气泡行为研究 奖励 解国新;雒建斌
66 Molecular dynamics simulation of shear-induced graphitizaiton of amorfhous carbon films 奖励 马天宝|胡元中|王慧|
67 泵浦耦合结构 专利 巩马理;黄磊;柳强;闫平;张海涛
68 一种采用槽型线圈的平面电机 专利 朱煜;张鸣;汪劲松;闵伟;胡金春;尹文生;杨开明;徐登峰;段广洪;蔡田
69 一种光纤分束器 专利 巩马理;郝金坪;闫平;肖起榕;张海涛
70 The generation of nano sandwich sheets in ring area around cavitation erosion pit on the surface of carbon steel 期刊论文 Yan, Dayun|Wang, Jiadao|Liu, Fengbin|Chen, Darong|
71 Abrasive rolling effects on material removal and surface finish in chemical mechanical polishing analyzed by molecular dynamics simulation 期刊论文 Si Lina;Guo Dan;Luo Jianbin;Lu Xinchun;Xie Guoxin
72 Characteristics of the wear process of side-wall surfaces in bulk-fabricated Si-MEMS devices in nitrogen gas environment 期刊论文 Shen Sihan|Meng Yonggang|Zhang Wei|
73 The rheological properties of magnetic field excited magnetic powders sheared between two parallel plates 期刊论文 Chen Kaikai;Tian Yu;Shan Lei;Zhang Xiangjun;Meng Yonggang
74 光纤束制作方法、光纤束和光纤束靶耦合装置 专利 巩马理; 张海涛; 周洁; 闫平; 柳强; 黄磊
75 In Situ Measurement of Fluid Pressure at the Wafer-Pad Interface during Chemical Mechanical Polishing of 12-inch Wafer 期刊论文 Zhao Dewen;He Yongyong;Lu Xinchun
76 Contact stress non-uniformity of wafer surface for multi-zone chemical mechanical polishing process 期刊论文 Wang Tongqing;Lu Xinchun;Zhao Dewen;He Yongyong
77 一种用于提高能量集中度的光纤 专利 巩马理; 肖起榕; 王飞; 陈霄; 闫平; 张海涛
78 Preparation of poly(N-isopropylacrylamide) brush bonded on silicon substrate and its water-based lubricating property 期刊论文 Liu, YuHong|Xiao, YuQi|Luo, JianBin|
79 并联机构的现代分析与设计理论 奖励 刘辛军;汪劲松;唐晓强;王立平;吴军;李铁民;关立文
80 小型高速水洞实验段形状对流场影响的数值模拟 期刊论文 张岩|汪家道|陈大融|
81 The effectiveness of an antifouling compound coating based on a silicone elastomer and colored phosphor powder against Navicula species diatom 期刊论文 Cao Shan;Wang Jiadao;Zhang Yan;Chen Darong
82 高水基乳化液成膜特性及机理研究 奖励 马丽然;雒建斌
83 Effect of slurry injection position on material removal in chemical mechanical planarization 期刊论文 Wang Tongqing;Zhao Dewen;He Yongyong;Lu Xinchun
84 Effect of process parameter on particle removal efficiency in brush scrubber cleaning 会议论文 Mei Hegeng|Wang Jie|Lu Xinchun|
85 EHL properties of polyalkylene glycols and their aqueous solutions 期刊论文 Zhang, Chen Hui|Zhao, Ying Chun|Bjö|rling, Marcus|Wang, Yan|Luo, Jian Bin|Prakash, Braham|
86 IFToMM 服务奖 奖励 雒建斌
87 非线性晶体温度控制装置 专利 巩马理;黄磊;柳强;闫平;张海涛
88 Excellent Lubricating Behavior of Brasenia schreberi Mucilage 期刊论文 Li Jinjin;Liu Yuhong;Luo Jianbin;Liu Pengxiao;Zhang Chenhui
89 外加电场下纳米级润滑膜的成膜特性及微气泡行为研究 奖励 解国新;雒建斌
90 一种润滑油的极限工作温度和高温耐磨性能测试方法 专利 张向军; 熊春华; 王渊渊; 徐金龙; 乔小溪; 赵巍
91 Settlement and cell division of diatom Navicula can be influenced by light of various qualities and intensities 期刊论文 Cao Shan;Wang Jiadao;Chen Darong
92 Investigations on the mechanism of superlubricity achieved with phosphoric acid solution by direct observation 期刊论文 Li Jinjin;Ma Liran;Zhang Shaohua;Zhang Chenhui;Liu Yuhong;Luo Jianbin
93 Stress analysis of Cu/low-k interconnect structure during whole Cu-CMP process using finite element method 期刊论文 Liao Chenglong;Guo Dan;Wen Shizhu;Lu Xinchun;Luo Jianbin
94 一种并联三自由度主轴头驱动机构 专利 王立平;汪劲松;关立文;黄 鹏;姚 蕊
95 中国机械工程学会青年科技成就奖 奖励 张显程()()
96 An optimized amplitude-weighting wavefront correction algorithm in laser systems 期刊论文 Qiao Xue;Lei Huang;Ping Yan;Mali Gong;Yuntao Qiu;Tenghao Li;Zexin Feng;Xingkun Ma
97 保偏光纤侧面泵浦耦合器及其制造方法 专利 巩马理;肖起榕;闫平;张海涛;柳强;黄磊
98 采用三维永磁阵列的平面电机 专利 朱煜;张鸣;汪劲松;闵伟;胡金春;尹文生;杨开明;徐登峰;段广洪;蔡田
99 Ab initio study of the friction mechanism of fluorographene and graphene 期刊论文 Wang Linfeng;Ma Tianbao;Hu Yuanzhong;Wang Hui;Shao Tianmin
100 掺镱光纤激光器 专利 巩马理;闫平;肖起榕;柳强;张海涛;黄磊;刘欢
101 Adsorption Mechanism of Benzotriazole on Copper Surface in CMP Based Slurries Containing Peroxide and Glycine 会议论文 Li Jing|Lu Xinchun|Ou Junyu|Cheng Jie|
102 一种光纤分束装置 专利 巩马理; 郝金萍; 闫平; 肖起榕; 张海涛
103 摩擦学最高成就奖 奖励 雒建斌
104 Type synthesis of 2T1R-type parallel kinematic mechanisms and the application in manufacturing 期刊论文 Xie Fugui;Liu Xin-Jun;You Zheng;Wang Jinsong
105 Tunable tribological properties in water-based lubrication of water-soluble fullerene derivatives via varying terminal groups 期刊论文 Liu YuHong;Liu PengXiao;Che Lu;Shu ChunYing;Lu XinChun
106 Analysis of Measurement Inaccuracy in Superlubricity Tests 期刊论文 Li Jinjin;Zhang Chenhui;Sun Liang;Luo Jianbin
107 Ecological and social modeling for migration and adhesion pattern of a benthic diatom 期刊论文 Shan Cao;Jiadao Wang;Dangguo Li;Darong Chen
108 具有冷却功能的光纤耦合器 专利 巩马理;肖起榕;闫平;张海涛;李丹
109 专用项目 奖励 陈钱;顾国华;何伟基;张闻文;等
110 机械设备健康维护的若干理论与方法 奖励 褚福磊;彭志科;卢文秀;袁胜发;何永勇;陈真勇
111 300mm晶圆化学机械抛光流体润滑行为研究 奖励 赵德文
112 Dimension optimization of a planar 3-RRR parallel manipulator considering motion/force transmissibility 会议论文 Liu XJ;Chen YZ;Chen X
113 一种呈阵列布置的多掩模光刻机硅片台系统 专利
114 Contact Electrification between Polytetrafluoroethylene and Steel 奖励 张远月|邵天敏|
115 光纤耦合器 专利 巩马理;肖起榕;闫平;陈霄;张海涛
116 一种用于硅晶片精抛光的抛光组合物 专利 潘国顺;顾忠华;邹春莉;李拓;雒建斌;路新春;刘岩
117 微米结构聚合物涂层的制备及减阻性能研究 期刊论文 封贝贝;张岩;豆照良;汪家道;陈大融
118 激光增益介质冷却装置 专利 巩马理; 黄磊; 柳强; 闫平; 张海涛
119 氧化硅团簇切削单晶硅粗糙峰的分子动力学模拟研究 期刊论文 司丽娜;郭丹;雒建斌
120 Kinematic optimization for chemical mechanical polishing based on statistical analysis of particle trajectories 期刊论文 Zhao, Dewen|Wang, Tongqing|He, Yongyong|Lu, Xinchun|
121 Effect of kinematic parameters and their coupling relationships on global uniformity of chemical-mechanical polishing 期刊论文 Zhao Dewen;He Yongyong;Wang Tongqing;Lu Xinchun
122 Beam shaping system design using double freeform optical surfaces 期刊论文 Zexin Feng|Lei Huang|Mali Gong|Guofan Jin|
123 Tunable water-based lubrication behavior of alkyl- and fluoroalkyl-silanes 期刊论文 Liu YuHong;Liu PengXiao;Xiao YuQi
124 一种用于化学机械平坦化的抛光垫及其制造方法 专利 雒建斌;韩桂全;刘宇宏;路新春
125 一种高去除低划伤的硅片化学机械抛光组合物及其制备方法 专利 潘国顺;李拓;顾忠华;雒建斌;路新春;刘岩
126 一种光纤双向多火头控制系统 专利 闫平;肖起榕;陈霄;巩马理
127 晶片边缘膜厚测量方法 专利 路新春; 沈攀; 何永勇
128 一种采用端面镀膜腔镜的光纤激光器 专利 巩马理; 闫平; 张海涛; 郝金坪; 廖素英
129 STLE International Award 奖励 雒建斌
130 Probing particle movement in CMP with fluorescence technique 期刊论文 Lei Jun;Guo Dan;Luo Jianbin;Pan Guoshun
131 Wafer bending/orientation characterization and their effects on fluid lubrication during chemical mechanical polishing 期刊论文 Zhao, Dewen|He, Yongyong|Wang, Tongqing|Lu, Xinchun|Luo, Jianbin|
132 Electrochemical investigation of copper passivation kinetics and its application to low-pressure CMP modeling 期刊论文 Li Jing;Liu Yuhong;Wang Tongqing;Lu Xinchun;Luo Jianbin
133 In-situ Measurement of Fluid Pressure Distribution and Its Effects on Chemical Mechanical Polishing of 12' Wafer 奖励 赵德文|何永勇|路新春|
134 一种改善板条型固体激光器输出光束不对称的装置及方法 专利 巩马理;高松;刘欢;柳强;闫平;张海涛;黄磊
135 Effects of PFPE Lubricant Properties on the Critical Clearance and Rate of the Lubricant Transfer from Disk Surface to Slider 期刊论文 Li, Ning|Meng, Yonggang|Bogy, David B.|
136 一种采用短增益光纤的光纤激光器 专利 闫平; 郝金萍; 肖起榕; 巩马理; 张海涛
137 Achievement of a near-perfect smooth silicon surface 期刊论文 Li Jing;Liu Yuhong;Dai Yuanjing;Yue Dachuan;Lu Xinchun;Luo Jianbin
138 Controllable interfacial adhesion applied to transfer light and fragile objects by using gecko inspired mushroom-shaped pillar surface 期刊论文 Zhou, Ming|Tian, Yu|Sameoto, Dan|Zhang, Xiangjun|Meng, Yonggang|Wen, Shizhu|
139 一种硅晶片抛光组合物及其制备方法 专利 潘国顺; 顾忠华; 龚桦; 邹春莉
140 Optimization of design of experiment for chemical mechanical polishing of a 12-inch wafer 期刊论文 Wang Tongqing;Lu Xinchun;Zhao Dewen;He Yongyong;Luo Jianbin
141 ULSI多层铜布线铜的低下压力化学机械抛光的组合物 专利 路新春;戴媛静;刘宇宏;潘国顺;雒建斌
142 Numerical and experimental investigation on multi-zone chemical mechanical planarization 期刊论文 Wang Tongqing;Lu Xinchun
143 并行注入光纤功率放大系统 专利 巩马理;闫平;郝金坪;肖起榕
144 一种激光工作物质的夹持散热方法及结构 专利 巩马理;王巍;闫平;张海涛;黄磊;柳强;翟刚
145 采用磁悬浮平面电机的硅片台多台交换系统 专利
146 一种金属薄膜厚度的电涡流测量方法 专利 赵乾; 孟永钢; 乐承宁; 路新春
147 超小间隙下磁头-磁盘界面稳定性的实验与理论研究 奖励 李宁|孟永钢|
148 机械与化学交互作用测量装置 专利 路新春;李静;赵德文;王同庆;何永勇;雒建斌
149 Direct observation of cavitation phenomenon and hydrodynamic lubrication analysis of textured surfaces 期刊论文 Zhang Jinyu;Meng Yonggang
150 一种激光脉冲尖峰抑制方法 专利 巩马理; 周洁; 闫平; 张海涛; 王东生
151 一种光纤锥区的制造方法 专利 闫平; 郝金萍; 巩马理; 肖起榕; 张海涛
152 细观与分子水平润滑摩擦的行为与机理 奖励 胡元中;王文中;马天宝;王慧;邹鲲;李欣;彭倚天;李瑞;刘雨川;冷永胜;张宇军
153 Effect of contact deformation on contact electrification: A first-principles calculation 期刊论文 Zhang, Yuanyue|Shao, Tianmin|
154 Electrospreading of dielectric liquid menisci on the small scale 期刊论文 Guoxin Xie;Jianbin Luo;Shuhai Liu;Dan Guo;Chenhui Zhang;Lina Si
155 一种抛光头 专利 路新春;王同庆;何永勇;雒建斌
156 Numerical simulation of junction point pressure during droplet formation in a microfluidic T-junction 期刊论文 Yan Ying;Guo Dan;Wen Shizhu.
157 Role of external magnetic field during friction of ferromagnetic materials 期刊论文 Jile Jiang;Yu Tian;Yonggang Meng
158 Measurement of the Friction between Single Polystyrene Nanospheres and Silicon Surface Using Atomic Force Microscopy 期刊论文 Guo Dan;Li Jingnan;Chang Li;Luo Jianbin
159 亚音速飞行器壁面沟槽减阻研究与应用 期刊论文 封贝贝;陈大融;汪家道
160 板条激光器 专利 巩马理; 柳强; 胡震岳; 黄磊
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